XC3M-1000 Thin Film Deposition Controller
INFICON's XC3M-1000 is an economical multiple layer closed-loop controller for sequentially depositing layers for multiple materials, sources, and crucibles. The XTC/3S is intended for applications where the entire process recipe resides in the Thin Film Controller. XTC/3M will store 99 processes, 999 layers, and 32 films. This advanced controller comes standard with INFICON's patented ModeLock measurement technology, TFT Color LCD with Graphics, (32) Programmable Films, (2) Sensor Measurement Channels, (2) Source Control Channels, 8/12 Dedicated I/O Circuitry, RS-232. See the available options at XTC-3 Product Sheet_2015.
