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Ion Source Parts

We supply replacements parts for Veeco Commonwealth Mark I, Mark II, Mark II+, Ion Tech, and Satisloh ion source equipment, including filaments, insulators, anodes, gas distributors, cathode tips, keepers and other parts. All of our parts are identical to or functionally equivalent to the competitive parts listed and are drop in replacements. Our parts are stock and we offer competitive pricing. Call us at 617-227-1133 or email paula@filtech.com for quantity pricing.

Mark II Cathode Tip

Veeco Commonwealth Mark II and Satisloh

We supply a complete listing of replacement parts for Veeco Commonwealth Mark II and Satisloh Ion Sources, including insulators, filaments, gas distributors, cathode tips, keepers and other source parts. All Mark II and comparable Satisloh style parts are offered at considerable savings.  See our complete list of Mark II Replacement Parts.

Veeco Commonwealth Mark II+

We supply a complete listing of replacement parts for Veeco Commonwealth Mark II+ Ion Sources, including insulators, filaments, gas distributors, and other source parts. See our list of Mark II+ Replacement Parts.

MarkIiisil

Veeco Commonwealth Mark I and Satisloh

We offer a complete listing of replacement parts for Veeco Commonwealth Mark I and Satisloh ion source parts, including insulators, filaments, anodes, gas distributors and other source parts. All Mark I and Satisloh parts are drop in replacements for the OEM parts.  See our complete list of Mark I Replacement Parts.

IS0035IS3107IonTech

Veeco Ion Tech

We supply Veeco Ion Tech 3 and 5 cm ion source gun parts including filaments and insulators at considerable savings. Our parts are drop in replacements for the OEM parts.

Kaufman Robinson

We supply filaments, insulators, hardware, and graphite reflectors for Kaufman Robinson EH200, EH400 and EH1000.