We have thermocouple gauges that are drop in replacements for the Hastings, Agilent, Axcelis, AMAT, Novellus, MKS and other OEM gauges. Our thermocouple gauges are available in the standard 1/8” NPT, VCR, KF16, or KF25 fittings. Fil-Tech also supplies Digital thermocouple controllers for our TC531 and TC6M gauges that measure from 1 x 10-3 torr to atmosphere and mount easily in the industry standard 3 bolt pattern. See our complete Thermocouple Cross Reference Guide.
Thermocouple Gauge Tubes and Digital Controllers
